An Advanced Calibration Method for Probe Leakage Correction in On-Wafer Test Systems

This article presents an advanced calibration method for solving the error terms due to probe-probe leakage in on-wafer test system. A new 12-term model system including vector network analyzer (VNA), frequency extenders, cables/waveguides, probes, probe contact pads and is introduced. two-step process algorithm with four on-chip standards one undefined Thru, two pairs of symmetrical Reflects such as Open-Open Short-Short pairs, a pair known Match loads has been developed. In addition, improved circuit load proposed enhanced accuracy. The tested on mismatched attenuator range between 0.2 110 GHz, results are compared numerical simulation existing methods. It shown that attenuator’s $\vert S_{11}\vert $ more consecutive S_{21}\vert by up-to 1.7 dB. evident simpler less stringent requirements which key at millimeter-wave terahertz frequencies. More importantly, suitable measurements DUTs have variable lengths.